UV LED Masking System

Microfluidics > UV LED Masking System


• Very compact table-top system for soft lithography and microfluidic chips fabrication
• High resolution up to 1 µm
• Up to 6” wafer and compatible with all photoresists
• Microfluidics, optics, biotechnology, microtechnology, photolithographic processes requiring single masking level, wafer bonding, simple layer or adhesive curing, etc.